Laser Microfabrication: Thin Film Processes and Lithography

by Ehrlich, Daniel J.
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ISBN: 9780122334306
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Overview

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
  • Format: Hardcover
  • Author: Ehrlich, Daniel J.
  • ISBN: 9780122334306
  • Condition: Used
  • Dimensions: 9.32 x 1.68
  • Number Of Pages: 587
  • Publication Year: 1989
Language: English

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